HermeS® Hermetic Wafers

The combination of strong materials and glass-to-metal technology helps MEMS equipment handle multiple threats, from repeated medical sterilization procedures to corrosive industrial production lines. The high mechanical, thermal and chemical resistance of HermeS® glass wafers makes a significant contribution to longer service life for MEMS devices. HermeS® Hermetic TGV Wafers can be attached directly onto a silicon MEMS, allowing considerable miniaturization in device design. HermeS® wafers enable superior processing and quality control in the production of MEMS devices and final applications by matching the CTE of the glass material and the solid metal vias.