HermeS® Hermetic Wafers

HermeS® Hermetic Wafers are glass wafers designed for MEMS applications with exceptional features including strong materials and glass-to-metal technology. The combination helps MEMS equipment handle multiple threats from repeated medical sterilization procedures to corrosive industrial production lines. The high mechanical, thermal and chemical resistance makes a significant contribution to longer service life for MEMS devices. HermeS® Hermetic TGV Wafers can be attached directly onto silicon MEMS, allowing considerable miniaturization in device design – up to 80% smaller than ceramic MEMS devices. The wafers enable superior processing and quality control in the production of MEMS devices by matching the CTE (coefficient of thermal expansion) of the glass material and the solid metal vias.